Specs
Performance Category | Specification |
|---|---|
| Required counting time for measurement of ULA (0.001) sample1 | (50%) 6hrs, (25%) 24hrs, (12.5%) 90hrs – (meas accuracy) time |
| Required counting time for measurement of LA (0.01) sample1 | (50%) 30 min, (25%) 2.5hrs, (12.5%) 9hrs – (meas accuracy) time |
| Typical counter efficiency | > 90% of 2pi |
| Energy Resolution (230Th source) | < 9% FWHM (at 4.6MeV) |
| Energy sensitivity range | 1.5-10 MeV |
| Sample sizes (typical min – max) | 300mm wafer (707 cm2) – 1800 cm2 |
Attribute | Requirement |
|---|---|
| Minimum sample size (typical) | 300mm wafer (707cm2) |
| Maximum sample size | 1800cm2 |
| Maximum sample weight | 20 lbs (9 kg) |
| Maximum sample thickness | 0.25 in (6.3 mm) |
| Counting gas | Argon (boiloff recommended) |
| Gas pressure | 21psi (150kPa) ± 5% |
| Line Voltage | 100-240 (VAC) 50/60Hz |
| Power consumption (Instrument) | 50 W (100 W maximum) |
| Power consumption (Laptop) | 30 W |
| System dimensions (L x W x H) | 65 in x 35 in x 27 in (165 cm x 89 cm x 69 cm) |
| Weight | 360 lb (163 kg) |
Counting system includes
- Counting Module – Sample handline, measurement chamber, signal processing electronics.
- Support Module – Power supplies, gas control, etc
- Laptop – Windows 7 professional, x64
- CounterMeasure – Sophisticated data collection, analysis, and instrument control application
- Support – One year of service and support
